Microscopic ion fluxes in plasma-aided nanofabrication of ordered carbon nanotip structures
نویسندگان
چکیده
Microscopic ion fluxes in plasma-aided nanofabrication of ordered carbon nanotip structures I. Levchenko and K. Ostrikov School of Physics, The University of Sydney, Sydney, New South Wales 2006, Australia M. Keidar Department of Aerospace Engineering, University of Michigan, Ann Arbor, Michigan 48109-2140 S. Xu Plasma Sources and Applications Center, National Institute of Education (NIE), Nanyang Technological University, 637616 Singapore
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